Micro- and Nanoflows by Valery Ya. Rudyak Vladimir M. Aniskin Anatoly A. Maslov Andrey V. Minakov & Sergey G. Mironov

Author:Valery Ya. Rudyak, Vladimir M. Aniskin, Anatoly A. Maslov, Andrey V. Minakov & Sergey G. Mironov
Language: eng
Format: epub
Publisher: Springer International Publishing, Cham

Fabrication of complex-shape microchannels: U-shaped and S-shaped channels with different bending radii, and also out-of-plane microchannels (e.g., coil pipes);

Broad variations of manifold design;

Fabrication of not only microchannels, but also other objects of versatile axisymmetric shapes: diffusers, nozzles, etc.;

Fabrication of channels that cannot be produced by other methods.

The main drawback of this technology is its poor manufacturability: it is completely manual and rather complicated, because it requires special skills of working with microscopic objects.

Silicon microchannel structures. A silicon microchannel matrix is a regular system of microchannels with a square cross-section and vertical walls whose length reaches hundreds of micrometers, whereas the transverse size ranges from several to several tens of micrometers (Figs. 3.9 and 3.10). To obtain such matrices with different channel parameters, researchers at the Institute of Semiconductor Physics of the Siberian Branch of the Russian Academy of Sciences developed a special process of electrochemical anodic etching of hole-type monocrystalline silicon. The current density in this process changes during etching in accordance with a certain law described analytically within the framework of the patented phenomenological model of obtaining silicon microchannels with a prescribed profile (Romanov et al. 2011).

Fig. 3.9SEM images of silicon microchannel matrices 4 × 4 μm: top view and side view

(presented by Romanov)

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